The Development of a Dual-Warhead Impact System for Dynamic Linearity Measurement of a High-g Micro-Electro-Mechanical-Systems (MEMS) Accelerometer

نویسندگان

  • Yunbo Shi
  • Zhicai Yang
  • Zongmin Ma
  • Huiliang Cao
  • Zhiwei Kou
  • Dan Zhi
  • Yanxiang Chen
  • Hengzhen Feng
  • Jun Liu
چکیده

Despite its extreme significance, dynamic linearity measurement for high-g accelerometers has not been discussed experimentally in previous research. In this study, we developed a novel method using a dual-warhead Hopkinson bar to measure the dynamic linearity of a high-g acceleration sensor with a laser interference impact experiment. First, we theoretically determined that dynamic linearity is a performance indicator that can be used to assess the quality merits of high-g accelerometers and is the basis of the frequency response. We also found that the dynamic linearity of the dual-warhead Hopkinson bar without an accelerometer is 2.5% experimentally. Further, we verify that dynamic linearity of the accelerometer is 3.88% after calibrating the Hopkinson bar with the accelerometer. The results confirm the reliability and feasibility of measuring dynamic linearity for high-g accelerometers using this method.

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عنوان ژورنال:

دوره 16  شماره 

صفحات  -

تاریخ انتشار 2016